SHS Web of Conferences

Intelligent Wafer Sensor Fault Detection Using Machine Learning

Shaikh Sadam Shaikh Salim, Aboli Hole, Tanmay Khelkar, Gaurav Borkar, Neha Yadav and Satish Lanjewar

SHS Web Conf., 230 (2026) 03001

Published online: 10 April 2026

DOI: 10.1051/shsconf/202623003001

Shaikh Sadam Shaikh Salim

Aboli Hole

Tanmay Khelkar

Gaurav Borkar

Neha Yadav

Satish Lanjewar

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